work_cvepox35m5bxzmuuep7w7pnqxq

Releases

2002-07-15 3D lumped parameter model for lithographic simulations
unknown status | paper-conference
doi:10.1117/12.474490

What is a "Work"?

A Fatcat "work" groups a set of releases that are all editings or editing stages of the same intellectual contribution. For example, a pre-print and a published article may contain small differences, but still reference the same underlying "work".