work_37tdtadzljc6zhr3tj65mjlqhi

Releases

2020-03-24 Delivering metal oxide photoresists for EUV: overcoming challenges to scaling (Conference Presentation)
unknown status | paper-conference
doi:10.1117/12.2552894

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A Fatcat "work" groups a set of releases that are all editings or editing stages of the same intellectual contribution. For example, a pre-print and a published article may contain small differences, but still reference the same underlying "work".