Resolution enhancement optimization methods in optical lithography with improved manufacturability release_zmvuuhfq7rhjhobm7g5jtzuca4

by Xu Ma

Published in Journal of Micro/Nanolithography by SPIE-Intl Soc Optical Eng.

2011   Volume 10, p023009

Archived Files and Locations

application/pdf  1.2 MB
file_eyxhhdi35fa6fbgnnujmlbkxjy
web.archive.org (webarchive)
vlsicad.ucsd.edu (web)
Read Archived PDF
Preserved and Accessible
Type  article-journal
Stage   published
Date   2011-04-01
Language   en ?
Journal Metadata
Not in DOAJ
In Keepers Registry
ISSN-L:  1932-5150
Work Entity
access all versions, variants, and formats of this works (eg, pre-prints)
Catalog Record
Revision: 801efeb8-9586-450e-8408-a3ce21d59148
API URL: JSON