Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography release_ytno56f6vbaenewdcnqtc6vn34

by D. Shir, E. C. Nelson, Y. C. Chen, A. Brzezinski, H. Liao, P. V. Braun, P. Wiltzius, K. H. A. Bogart, J. A. Rogers

Published in Applied Physics Letters by AIP Publishing.

2009   Volume 94, p011101

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