Initial investigations into the MOS interface of freestanding 3C-SiC layers for device applications

Arne Benjamin Renz; Fan Li; Oliver Vavasour; Peter Gammon; Tianxiang Dai; Guy William Clarke Baker; Francesco La Via; Marcin Zielinski; Luyang Zhang; Nicholas Grant; John Murphy; Philip A Mawby; Mike Jennings; Vishal Ajit Shah

doi:10.1088/1361-6641/abefa1

by Arne Benjamin Renz, Fan Li, Oliver Vavasour, Peter Gammon, Tianxiang Dai, Guy William Clarke Baker, Francesco La Via, Marcin Zielinski, Luyang Zhang, Nicholas Grant, John Murphy, Philip A Mawby (+2 others)

Published in Semiconductor Science and Technology by IOP Publishing.

2021

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Date 2021-03-17

DOI 10.1088/1361-6641/abefa1

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