Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge release_yhznji5jbrfx5j3zlvdscqa24e

by J. R. Woodworth, M. G. Blain, R. L. Jarecki, T. W. Hamilton, B. P. Aragon

ISSN-L 0734-2101
Volume 17
Page(s) 3209-3217
Release Year 1999
Container Type journal
Publisher American Vacuum Society
Primary Language en (lookup)

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Type  article-journal
Stage   published
Year   1999
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ISSN-L:  0734-2101
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