Peculiarities of an anomalous electronic current during atomic force microscopy assisted nanolithography on n-type silicon

by Sergei F Lyuksyutov, Pavel B Paramonov, Ivan Dolog, Robert M Ralich

Published in Nanotechnology by IOP Publishing.

Volume 14p716-721 (2003)

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published

Date 2003-05-01

DOI 10.1088/0957-4484/14/7/305

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ISSN-L: 0957-4484

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Peculiarities of an anomalous electronic current during atomic force microscopy assisted nanolithography on n-type silicon release_x7kzmnzzq5gozjh4deccbnfshi