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A nanomechanical switch for integration with CMOS logic
release_wgzy3ivpwnbyfgq46ncjxuizmy
by
David A Czaplewski, Gary A Patrizi, Garth M Kraus, Joel R Wendt, Christopher D Nordquist, Steven L Wolfley, Michael S Baker, Maarten P de Boer
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in Journal of Micromechanics and Microengineering by IOP Publishing.
2009 Volume 19, p085003
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Date 2009-07-09
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