A nanomechanical switch for integration with CMOS logic release_wgzy3ivpwnbyfgq46ncjxuizmy

by David A Czaplewski, Gary A Patrizi, Garth M Kraus, Joel R Wendt, Christopher D Nordquist, Steven L Wolfley, Michael S Baker, Maarten P de Boer

Published in Journal of Micromechanics and Microengineering by IOP Publishing.

2009   Volume 19, p085003

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