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Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet release_vdci6d7cw5dt7m3zypygyawtya

by V. Raballand, J. Benedikt, A. von Keudell

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release_date 2008-03-03
release_stage published
release_type article-journal
release_year 2008
subtitle
title Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet
version
volume 92
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Extra Metadata (raw JSON)

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