@article{raballand_benedikt_keudell_2008, 
  title={Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet}, 
  volume={92}, 
  DOI={10.1063/1.2844880}, 
  publisher={AIP Publishing}, 
  author={Raballand and Benedikt and Keudell}, 
  year={2008}, 
  month={Mar}
  }