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Fabrication of silicon microstructures using a high-energy ion beam
release_ue2lo37p3bgx3gqn6sm4s3kn7e
by
Ee Jin Teo, Minghui Liu, Mark B. H. Breese, Emmanuel P. Tavernier, Andrew A. Bettiol, Daniel J. Blackwood, Frank Watt
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2004
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