Development of STM-based Nanofabrication and Measurement System for Nano Devices.

by Daisuke FUJITA, Hanyu SHENG, Qidu JIANG, Zhenchao DONG, Hitoshi NEJOH

Published in Hyomen Kagaku by Surface Science Society Japan.

1997 Volume 18, p460-465

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Year 1997

DOI 10.1380/jsssj.18.460

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ISSN-L: 0388-5321

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Development of STM-based Nanofabrication and Measurement System for Nano Devices. STMによるナノデバイス作製・評価システムの開発 release_tiicfmufnnaktin7jgyspt5wpu