Integrated micro-electro-mechanical sensor development for inertial applications release_tgqrtdny5jemfptg2obnj2bkvu

by J.J. Allen, R.D. Kinney, J. Sarsfield, M.R. Daily, J.R. Ellis, J.H. Smith, S. Montague, R.T. Howe, B.E. Boser, R. Horowitz, A.P. Pisano, M.A. Lemkin (+2 others)

Released as a paper-conference by IEEE.

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