On-Chip Variable Inductor Using Microelectromechanical Systems Technology release_rxzrqcbsgfderbpeuzywwzkpjq

by Yoshisato Yokoyama, Takashi Fukushige, Seiichi Hata, Kazuya Masu, Akira Shimokohbe

Published in Japanese Journal of Applied Physics by Japan Society of Applied Physics.

2003   Volume 42, Issue Part 1, No. 4B, p2190-2192

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