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3D lumped parameter model for lithographic simulations
release_rev_6b085ae9-53b0-4cf1-8ceb-4007c5f370ef
by
Jeff D. Byers, Mark D. Smith, Chris A. Mack
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as a paper-conference
by SPIE.
2002
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Date 2002-07-15
paper-conferenceStage
unknown
Date 2002-07-15
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