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Molecular Dynamics Modeling of Octadecaborane Implantation into Si
release_rev_3adb089a-4abf-4de1-a77a-a55f503aae37
by
Luis A. Marqués, L. Pelaz, I. Santos, P. López, M. Aboy
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in Simulation of Semiconductor Processes and Devices 2007 by Springer Vienna.
p17-20
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