The Effect of Deposition Temperature of Pb(Zr,Ti)O<sub>3</sub>(PZT)Thin Films with Thicknesses of around 100 nm on the Piezoelectric Response for Nano Storage Applications

by Wook Song Han

Published in World Journal of Condensed Matter Physics by Scientific Research Publishing, Inc,.

2012 Volume 02, Issue 02, p51-56

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Year 2012

DOI 10.4236/wjcmp.2012.22009

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ISSN-L: 2160-6927

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The Effect of Deposition Temperature of Pb(Zr,Ti)O<sub>3</sub>(PZT)Thin Films with Thicknesses of around 100 nm on the Piezoelectric Response for Nano Storage Applications release_rcsxhjodk5bkzodsq36afw2xra