Physical and Chemical Investigation of Substrate Temperature Dependence of Zirconium Oxide Films on Si(100) release_q3wqf6624fblfkt5wmagfji2ze

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issue 11
language en
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pages 2729-2734
publisher Korean Chemical Society
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release_date 2009-11-20
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title Physical and Chemical Investigation of Substrate Temperature Dependence of Zirconium Oxide Films on Si(100)
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volume 30
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