Physical and Chemical Investigation of Substrate Temperature Dependence of Zirconium Oxide Films on Si(100) release_q3wqf6624fblfkt5wmagfji2ze

Published in Bulletin of the Korean Chemical Society (Print) by Korean Chemical Society.

2009   Volume 30, Issue 11, p2729-2734

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Type  article-journal
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Date   2009-11-20
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