Epitaxial Growth of AlN on (0001) Sapphire: Assessment of HVPE Process by a Design of Experiments Approach release_oqaqxtfmmjap5nmdowx5y4weca

by Raphaël Boichot, Danying Chen, Frédéric Mercier, Francis Baillet, Gaël Giusti, Thomas Coughlan, Mikhail Chubarov, Michel Pons

Published in Coatings by MDPI AG.

2017   p136

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Date   2017-09-01
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