Atomic layer etching of gallium nitride (0001) release_oaxyfanoinb53omfrrdaxk5sf4

by Christoffer Kauppinen, Sabbir Ahmed Khan, Jonas Sundqvist, Dmitry B. Suyatin, Sami Suihkonen, Esko I. Kauppinen, Markku Sopanen

Published in Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films by American Vacuum Society.

2017   Volume 35, p060603

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