Atomic layer etching of gallium nitride (0001)

by Christoffer Kauppinen, Sabbir Ahmed Khan, Jonas Sundqvist, Dmitry B. Suyatin, Sami Suihkonen, Esko I. Kauppinen, Markku Sopanen

2017 Volume 35, p060603

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Year 2017
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DOI 10.1116/1.4993996

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ISSN-L: 0734-2101

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Atomic layer etching of gallium nitride (0001) release_oaxyfanoinb53omfrrdaxk5sf4