Transient and quasi-stationary simulation of heat and mass transfer in Czochralski silicon crystal growth

by A. Voigt, C. Weichmann, J. Nitschkowski, E. Dornberger, R. Hölz

Published in Crystal research and technology (1981) by Wiley.

2003 Volume 38, p499-505

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Year 2003

DOI 10.1002/crat.200310063

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Transient and quasi-stationary simulation of heat and mass transfer in Czochralski silicon crystal growth release_o6oxargg5bebzpt5yealk5j6ta