Effect of hydrogen dilution on the deposition rate of hydrogenerated amorphous silicon films in a modified pulsed plasma discharge release_lekjbvye7jd5td3okolqv3upaa

by C. Mukherjee, C. Anandan, Tanay Seth, P. N. Dixit, R. Bhattacharyya

Published in Applied Physics Letters by AIP Publishing.

1996   Volume 68, p835-837

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