Direct comparison of boron, phosphorus, and aluminum gettering of iron in crystalline silicon release_ip62w3fsxnbvdforusgns6gqna

by S. P. Phang, D. Macdonald

Published in Journal of Applied Physics by AIP Publishing.

2011   Volume 109, p073521

Archived Files and Locations

application/pdf  392.5 kB
file_4h4el562ovh3xo2xgd7epblqku
pv.cecs.anu.edu.au (web)
web.archive.org (webarchive)
application/pdf  371.8 kB
file_curfdd7hlzgydpsqu3omvnmaqa
openresearch-repository.anu.edu.au (web)
web.archive.org (webarchive)
web.archive.org (webarchive)
openresearch-repository.anu.edu.au (web)
digitalcollections.anu.edu.au (web)
+ 3 more URLs
Read Archived PDF
Preserved and Accessible
Type  article-journal
Stage   published
Year   2011
Language   en ?
Journal Metadata
Not in DOAJ
In Keepers Registry
ISSN-L:  0021-8979
Work Entity
access all versions, variants, and formats of this works (eg, pre-prints)
Catalog Record
Revision: 16fb7d82-93ea-473e-b10f-c6da5a22dc8d
API URL: JSON