Robust Repetitive Controller for Fast AFM Imaging
release_iierwbmcincxlkb7onnhoqyx44
by
Serkan Necipoglu, Selman Cebeci, Yunus Has, Levent Guvenc, Cagatay
Basdogan
2012
Abstract
Currently, Atomic Force Microscopy (AFM) is the most preferred Scanning Probe
Microscopy (SPM) method due to its numerous advantages. However, increasing the
scanning speed and reducing the interaction forces between the probe's tip and
the sample surface are still the two main challenges in AFM. To meet these
challenges, we take advantage of the fact that the lateral movements performed
during an AFM scan is a repetitive motion and propose a Repetitive Controller
(RC) for the z-axis movements of the piezo-scanner. The RC utilizes the profile
of the previous scan line while scanning the current line to achieve a better
scan performance. The results of the scanning experiments performed with our
AFM set-up show that the proposed RC significantly outperforms a conventional
PI controller that is typically used for the same task. The scan error and the
average tapping forces are reduced by 66% and 58%, respectively when the scan
speed is increased by 7-fold.
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