Poisson's Ratio Evaluation of LPCVD Silicon Nitride Film release_hyv2owg6ujedzf6mc2szeaetim

by Osamu Tabata, Toshiyuki Tsuchiya

Published in IEEJ Transactions on Sensors and Micromachines by Institute of Electrical Engineers of Japan (IEE Japan).

1996   Volume 116, p34-35

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Year   1996
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