Selective growth of TiO[sub 2] thin films on Si(100) surfaces by combination of metalorganic chemical vapor deposition and microcontact printing methods release_htfkmrmobvaohpeg5tf5kj2uwi

by B.-C. Kang, J.-H. Lee, H.-Y. Chae, D.-Y. Jung, S.-B. Lee, J.-H. Boo

Published in Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena by American Vacuum Society.

2003   Volume 21, p1773

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