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Selective growth of TiO[sub 2] thin films on Si(100) surfaces by combination of metalorganic chemical vapor deposition and microcontact printing methods
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by
B.-C. Kang, J.-H. Lee, H.-Y. Chae, D.-Y. Jung, S.-B. Lee, J.-H. Boo
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in Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena by American Vacuum Society.
2003 Volume 21, p1773
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