Microstructure analysis of polyurethane based polishing materials release_degqub5wmzcvzkulijg4t2p4r4

by D. I. Terashkevich, E. S. Bokova, A. S. Ginzburg, G. M. Kovalenko

Published in Plasticheskie massy by Publishing House Plastic Ltd.

2021   Issue 1-2, p3-6

Abstract

This paper presents the results of porous structure analysis of polishing materials based on polyurethanes used in chemicalmechanical planarization process of IC layers.
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