| ISSN-L | 0018-8646 |
| Volume | 14 |
| Page(s) | 168-171 |
| Release Year | 1970 |
| Container Type | journal |
| Publisher | IBM |
Application of RF Discharges to Sputtering
release_cyecei2pqve57cefekropyatdm
by
H. R. Koenig, L. I. Maissel
Published
in IBM Journal of Research and Development
by IBM
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application/pdf 130.8 kB
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Year 1970
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Year 1970
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