Application of RF Discharges to Sputtering release_cyecei2pqve57cefekropyatdm

by H. R. Koenig, L. I. Maissel

ISSN-L 0018-8646
Volume 14
Page(s) 168-171
Release Year 1970
Container Type journal
Publisher IBM

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Type  article-journal
Stage   published
Year   1970
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ISSN-L:  0018-8646
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