ISSN-L | 0018-8646 |
Volume | 14 |
Page(s) | 168-171 |
Release Year | 1970 |
Container Type | journal |
Publisher | IBM |
Application of RF Discharges to Sputtering
release_cyecei2pqve57cefekropyatdm
by
H. R. Koenig, L. I. Maissel
Published
in IBM Journal of Research and Development
by IBM
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application/pdf 385.0 kB
sha1:aa9ce278a32e98138707...
|
web.archive.org (webarchive) www.research.ibm.com:80 (web) web.archive.org (webarchive) |
application/pdf 130.8 kB
sha1:9dded98f2a27bb0f3cb9...
|
www.research.ibm.com (web) web.archive.org (webarchive) |
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Type
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Year 1970
article-journal
Stage
published
Year 1970
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Open Access Publication
Not in DOAJ
Not in ISSN ROAD
In Keepers Registery
ISSN-L:
0018-8646
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grouping other versions (eg, pre-print) and variants of this release
grouping other versions (eg, pre-print) and variants of this release
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Worldcat
SHERPA/RoMEO (journal policies)
wikidata.org
CORE.ac.uk
Semantic Scholar
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