Improvement of EUV Si hardmask performance through wet chemistry functionalization release_agnnzadfqrcbviautkme5zaz2a

by Yichen Liang, Andrea M. Chacko, Samantha Oelklaus, Ethan Lowrey, Veerle Van Driessche, Sedlacek R. Ivan, Ming Luo, Stephen M. Grannemann, Douglas J. Guerrero

Released as a paper-conference by SPIE.

2020  

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Type  paper-conference
Stage   unknown
Date   2020-03-23
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