Method of Estimating Young's Modulus of Thin Films by Applying Contact Mechanics.
接触論を利用した薄膜のヤング率推定法 release_adks5cyjuzetneyrwkrff55ky4

by Juhachi ODA, Kouji YAMADA, Takashi KUBOTA

Published in TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A by Japan Society of Mechanical Engineers.

1991   Volume 57, Issue 542, p2608-2613

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Year   1991
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