@inproceedings{ohta_nowak_suganuma_kameda_moriya_yokoduka_kawasuji_fujimoto_mizoguchi_2012, 
  title={Development of the reliable high power pulsed carbon dioxide laser system for LPP EUV light source}, 
  DOI={10.1117/12.916586}, 
  publisher={SPIE}, 
  author={Ohta and Nowak and Suganuma and Kameda and Moriya and Yokoduka and Kawasuji and Fujimoto and Mizoguchi}, 
  editor={Naulleau and II}, 
  year={2012}, 
  month={Mar}
  }