SOL-GEL SYNTHESIS OF STRONTIUM TITANATE THIN FILMS AND PERSPECTIVES OF THEIR APPLICATIONS IN PRODUCTION OF ELEMENTS OF ELECTRONIC DEVICE
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A. H. Sohrabi, N. V. Gaponenko, M. V. Rudenko, S. M. Zavadski, D. A. Golosov, B. S. Kolosnitsin, V. V. Kolos, A. N. Pyatlitski, A. S. Turtsevich
2019 p10-15
Abstract
The strontium titanate thin films were fabricated on silicon using the sol-gel method. The strontium titanate phase was registered with X-ray diffraction analysis after heat treatment in the temperature range 750-1000 °C. The films were deposited by spin-on technique and the film thickness was in the range of 90-250 nm depending on numbers of layer. The perspectives of developments of the sol-gel method for the formation of elements of electronic device as well as varistors and capacitors on the basis of SrTiO3 xerogels are discussed.
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