SOL-GEL SYNTHESIS OF STRONTIUM TITANATE THIN FILMS AND PERSPECTIVES OF THEIR APPLICATIONS IN PRODUCTION OF ELEMENTS OF ELECTRONIC DEVICE release_47e4wncmgvf67nuk7w2rdhucle

by A. H. Sohrabi, N. V. Gaponenko, M. V. Rudenko, S. M. Zavadski, D. A. Golosov, B. S. Kolosnitsin, V. V. Kolos, A. N. Pyatlitski, A. S. Turtsevich

Published in Doklady BGUIR by Educational institution «Belarusian State University of Informatics and Radioelectronics».

2019   p10-15

Abstract

The strontium titanate thin films were fabricated on silicon using the sol-gel method. The strontium titanate phase was registered with X-ray diffraction analysis after heat treatment in the temperature range 750-1000 °C. The films were deposited by spin-on technique and the film thickness was in the range of 90-250 nm depending on numbers of layer. The perspectives of developments of the sol-gel method for the formation of elements of electronic device as well as varistors and capacitors on the basis of SrTiO3 xerogels are discussed.
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