Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar release_3j3j752vfjfj5pdm6np5jtb5me

by Grzegorz Greczynski, Igor Zhirkov, Ivan Petrov, J. E. Greene, Johanna Rosen

Published in Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films by American Vacuum Society.

2017   Volume 35, p060601

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