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Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar
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Grzegorz Greczynski, Igor Zhirkov, Ivan Petrov, J. E. Greene, Johanna Rosen
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in Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films by American Vacuum Society.
2017 Volume 35, p060601
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Semantic Scholar
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