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Associated Releases

2008-03-03

Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet
published | article-journal
doi:10.1063/1.2844880

Public Access URLs

web	`http://reaktiveplasmen.rub.de/files/paper/2008/SiO2depositionAPL.pdf`
webarchive	`https://web.archive.org/web/20170810184207/http://reaktiveplasmen.rub.de/files/paper/2008/SiO2depositionAPL.pdf`

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SHA-1	`883a6b86bc2269d7c2259f2b493e2a763de8febb`
SHA-256	`57166b3b9798c9d5aa4aa918e93cdcdd40fa1000bd31c4b688b0a1e4f1d4644f`
MD5	`9ae895a2e6e49e3d70f9eb2d91e8c182`

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