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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
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American Vacuum Society
Homepage URLs
http://ieeexplore.ieee.org/servlet/opac?punumber=4915548 |
https://avs.scitation.org/journal/jva |
Example Publications
Plasma-enhanced atomic layer deposition of silicon nitride for front-end-of-line applications
Marco Lisker, Mamathamba Kalishettyhalli Mahadevaiah, Keerthi Dorai Swamy Reddy
2023
|
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
doi:10.1116/6.0002424
Versailles Project on Advanced Materials and Standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene
Benjamen P. Reed, David J. H. Cant, Steve J. Spencer, Abraham Jorge Carmona-Carmona, Adam Bushell, Alberto Herrera-Gómez, Akira Kurokawa, Andreas Thissen, Andrew G. Thomas, Andrew J. Britton, Andrzej Bernasik, Anne Fuchs
(+39 others)
2020
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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
doi:10.1116/6.0000577 pmcid:PMC7688089
Uranium and arsenic unregulated water issues on Navajo lands
Jani C. Ingram, Lindsey Jones, Jonathan Credo, Tommy Rock
2020
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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
doi:10.1116/1.5142283 pmcid:PMC7083651
Molecular mechanisms of atomic layer etching of cobalt with sequential exposure to molecular chlorine and diketones
Mahsa Konh, Chuan He, Xi Lin, Xiangyu Guo, Venkateswara Pallem, Robert L. Opila, Andrew V. Teplyakov, Zijian Wang, Bo Yuan
2019
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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
doi:10.1116/1.5082187 pmcid:PMC6396405
Digitally alloyed ZnO and TiO2 thin film thermistors by atomic layer deposition for uncooled microbolometer applications
Bilge T. Tilkioglu, Sami Bolat, Mahmud Yusuf Tanrikulu, Ali Kemal Okyay
2017
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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
doi:10.1116/1.4976513